Session: 5C

Surface acoustic waves (SAW) are used to coherently excite nanofabricated free standing beam resonators. Typical resonator sizes are L = 3.5 μm, w = 300nm, and h = 200nm, resulting in mechanical eigenfrequencies of the order of 100 MHz. Depending on the ratio between the resonator eigenfrequency and the frequency of the driving SAW, and depending on the SAW amplitude, we observe a complex interaction spectrum like mode locking or parametric oscillations of the NEMS beam. We give a detailled desription of our experimental findings in terms of a theoretical model. Moreover, we demonstrate that our unique experiment can even yield insight into the microscopic distribution of lattice defects and their dynamics in a nanometer size mechanical single crystal resonator. Acknowledgement: We gratefully acknowledge financial support by the Deutsche Forschungsgemeinschaft DFG.